High Resolution Lens System For Submicron Photolithography

Anthony R. Phillips; M. John Buzawa

doi:10.1117/12.959100

16 September 1980 High Resolution Lens System For Submicron Photolithography

Anthony R. Phillips, M. John Buzawa

Proceedings Volume 0237, 1980 International Lens Design Conference; (1980) https://doi.org/10.1117/12.959100
Event: 1980 International Lens Design Conference, 1980, Oakland, United States

Abstract

New technology in the field of integrated circuits has created a demand for photolithographic projection lenses capable of producing submicron line structures. Tropel has introduced a series of UV Micro Tropar objectives for this specific application.These lenses achieve their superior performance by utilizing the 365nm line and increasing the numerical aperture to 0.40. Optical design considerations in the development of these lenses included appropriate materials selection, field vs. aperture tradeoffs, telecentricity constraints, and partial coherence effects due to underfill of the lens pupil. Manufacturing problems are accentuated by the extremely tight tolerances on all of the construction parameters of the lens system. Special interferometric test equipment, used to provide precise measurements of each lens element, has proven to be indispensable in the fabrication of these objectives. Mounting of these elements on a common optical axis is an absolute necessity if the ultimate resolution of the design is to be achieved. Testing of these lenses is also a challenge due to the high spatial frequencies involved and limitations on visual examination of the image. Methods of circumventing these difficulties will be discussed. Typical MTF test results and performance data will be presented.

Citation Download Citation

Anthony R. Phillips and M. John Buzawa "High Resolution Lens System For Submicron Photolithography", Proc. SPIE 0237, 1980 International Lens Design Conference, (16 September 1980); https://doi.org/10.1117/12.959100

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available