Infrared Properties Of Heavily Implanted Silicon, Germanium And Gallium Arsenide

William G Spitzer; Lihyeh Liou; Kou-Wei Wang; Charles N. Waddell; Graham Hubler; Sook-Il Kwun

doi:10.1117/12.941346

31 May 1984 Infrared Properties Of Heavily Implanted Silicon, Germanium And Gallium Arsenide

William G Spitzer, Lihyeh Liou, Kou-Wei Wang, Charles N. Waddell, Graham Hubler, Sook-Il Kwun

Proceedings Volume 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials; (1984) https://doi.org/10.1117/12.941346
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

A review of the techniques developed for using infrared reflection spectroscopy to study properties of heavily implanted semiconductors is presented. Several structural models are considered and calculations based on them are applied to measurements of implanted Si, Ge and GaAs. These comparisons of model calculations and measured spectra show how a number of important physical parameters can be obtained as well as new information concerning implantation-induced amorphous material.

Citation Download Citation

William G Spitzer, Lihyeh Liou, Kou-Wei Wang, Charles N. Waddell, Graham Hubler, and Sook-Il Kwun "Infrared Properties Of Heavily Implanted Silicon, Germanium And Gallium Arsenide", Proc. SPIE 0463, Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials, (31 May 1984); https://doi.org/10.1117/12.941346

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available