Theoretical And Numerical Comparison Of Some Grating Theories Applied In The Soft X-Ray Region

M. Breidne

doi:10.1117/12.944830

12 December 1984 Theoretical And Numerical Comparison Of Some Grating Theories Applied In The Soft X-Ray Region

M. Breidne

Author Affiliations +

Proceedings Volume 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II; (1984) https://doi.org/10.1117/12.944830
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

Many different formalisms treating diffraction efficiency of gratings have been developed. They are mainly designed to treat the problem in the 'resonance region', wavelength-to-period ratio approximately 1. The low value of this ratio for gratings in the X-ray region might give the impression that scalar diffraction theory would be able to predict grating efficiencies with a good agreement with experimentally measured values. However, this is not the case. The reason for this is the poor normal reflectivity of all materials in the X-ray region which makes it necessary to use grazing incidence mountings. Although polarization effects become less important as the angle of incidence tends towards grazing incidence, scalar theory does not give correct results for large angles of incidence. The performance of different theories: integral formalism, differential formalism, Rayleigh theory and the Beckmann theory, in the soft X-ray region will be presented. Both theoretical and computational aspects will be treated. Mainly, gratings having a sinusoidal profile are studied, but results for lamellar and echelette gratings will also be discussed.

Citation Download Citation

M. Breidne "Theoretical And Numerical Comparison Of Some Grating Theories Applied In The Soft X-Ray Region", Proc. SPIE 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II, (12 December 1984); https://doi.org/10.1117/12.944830

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