Large Scale In-Line Sputtering System For Magneto-Optical Data Storage Media

G. Brauer; S. Muller; E. Schultheib; H.-P. D. Shieh; P. Wirz

doi:10.1117/12.944618

2 June 1988 Large Scale In-Line Sputtering System For Magneto-Optical Data Storage Media

G. Brauer, S. Muller, E. Schultheib, H.-P. D. Shieh, P. Wirz

Proceedings Volume 0899, Optical Storage Technology and Applications; (1988) https://doi.org/10.1117/12.944618
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The LH A 400 in-line sputtering system for large scale production of magneto-optical disks is described. This system is based on a modular concept to realize different layer configurations of MO-disks. The deposition stations, loading and unloading chambers are separated by dynamic buffer modules to maintain a continuous flow of disk carriers and to guarantee the stability of the sputtering processes. Transmission and reflection spectra, coercivity and MO-signal of the coated disks are measured in real-time and fed back for on-line process control. Experimental results of a process development on dielectric (A1N and Si3N4) and magneto-optical (FeTbCo) thin films in a pilot machine are presented.

Citation Download Citation

G. Brauer, S. Muller, E. Schultheib, H.-P. D. Shieh, and P. Wirz "Large Scale In-Line Sputtering System For Magneto-Optical Data Storage Media", Proc. SPIE 0899, Optical Storage Technology and Applications, (2 June 1988); https://doi.org/10.1117/12.944618

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