Optical Profiling Using An Interference Microscope

B. Cencic; M. Barut; P. Langenbeck

doi:10.1117/12.947579

16 January 1989 Optical Profiling Using An Interference Microscope

B. Cencic, M. Barut, P. Langenbeck

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947579
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An interference microscope enables visual inspection of optically smooth surfaces in order to obtain quantitative data on surface roughness, size and depth of defects. We modified such an instrument into a phase-shifting interferometer. Some measurement results are presented and commented.

Citation Download Citation

B. Cencic, M. Barut, and P. Langenbeck "Optical Profiling Using An Interference Microscope", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947579

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available