Characterization Of Diamond-Like Films

N. R. Parikh; W. K. Chu; G. S. Sandhu; M. L. Swanson; C. Childs; J. M. Mikrut; L. E. McNeil

doi:10.1117/12.948148

17 January 1989 Characterization Of Diamond-Like Films

N. R. Parikh, W. K. Chu, G. S. Sandhu, M. L. Swanson, C. Childs, J. M. Mikrut, L. E. McNeil

Proceedings Volume 0969, Diamond Optics; (1989) https://doi.org/10.1117/12.948148
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Thin diamond-like and diamond films, grown by remote plasma-enhanced CVD (RPECVD) and by plasma CVD, were characterized using optical microscopy, elastic recoil detection spectroscopy (ERD), and Raman scattering. The H concentration of the films was measured by ERD and was related to the growth parameters and to the quality of the films as determined by Raman scattering. The H content of samples grown by RPECVD at the Research Triangle Institute (RTI) increased with decreasing growth temperature, varying from 6 at% H at growth temperatures from 500-720°C, to 25 at% H at a growth temperature of 20°C. The characteristic Raman frequency of natural diamond, 1332 cm-1, was observed for samples grown by Crystallume Corp. and by General Electric Corp. The samples obtained from Crystallume showed circular "bull's-eye" features by optical microscopy, and the width of the 1332 cm-1 peak was broad, indicating highly strained crystallites. For a sample from G.E., most of the film was good quality diamond, as indicated by a sharp 1332 cm-1 diamond frequency; the bottom (substrate) part of the film contained more H than the top part.

Citation Download Citation

N. R. Parikh, W. K. Chu, G. S. Sandhu, M. L. Swanson, C. Childs, J. M. Mikrut, and L. E. McNeil "Characterization Of Diamond-Like Films", Proc. SPIE 0969, Diamond Optics, (17 January 1989); https://doi.org/10.1117/12.948148

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