Overview Of Advances In Photomask Substrate Flatness Requirements And Flatness Measurement Techniques

Raymond F. Leinen II

doi:10.1117/12.955356

8 August 1977 Overview Of Advances In Photomask Substrate Flatness Requirements And Flatness Measurement Techniques

Raymond F. Leinen II

Proceedings Volume 0100, Developments in Semiconductor Microlithography II; (1977) https://doi.org/10.1117/12.955356
Event: Developments in Semiconductor Microlithography II, 1977, San Jose, United States

Abstract

The continued demand by the integrated circuit industry for larger wafers and higher device densities has placed requirements in the photolithographic manufacturing system for "superflat" substrate glass. Superflat substrates are flatter than current master grades and are primarily used in projection printing. The accurate and consistent measurement of this glass as it relates to both the vendor/purchaser and the test/use situations is examined. This is accomplished through both an overview of the industry's status as well as specific measurement and computer generated data. The study concludes that while the industry objective of much flatter substrate glass is clearly established, the procedures and equipment used to measure this flatness have not, heretofore, been well defined.

Citation Download Citation

Raymond F. Leinen II "Overview Of Advances In Photomask Substrate Flatness Requirements And Flatness Measurement Techniques", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); https://doi.org/10.1117/12.955356

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available