Paper
17 February 2017 Analysis of ultrafast material processing using flexible beam delivery
S. Eilzer, M. Funck, B. Wedel
Author Affiliations +
Abstract
Flexible beam delivery can significantly simplify the necessary effort to connect a laser source to an application. While already a standard in high power cw-applications, ultrashort pulse applications in the ps to fs regime mainly relies on free space beam delivery to date. In the last years we have introduced and characterized a modular beam delivery system for ultrashort high energy pulses [1]. It is based on micro structured hollow core fibers that confine the light into a hollow core and thereby allow pulse delivery way above the damage threshold of silica with minimal influence on the pulse. Ultrafast pulses with pulse energies of several 100 μJ and average powers of several 100 W can be transmitted with high single mode beam quality. Additionally, nonlinear effects inside the fiber can be actively used to adjust pulse parameters on the fly, e.g. an effective pulse compression which increases the peak power even further.

Here we show the analysis of short pulse material processing using the flexible beam delivery. Results for sensitive processes as well as the active use of nonlinear spectral broadening are shown.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Eilzer, M. Funck, and B. Wedel "Analysis of ultrafast material processing using flexible beam delivery", Proc. SPIE 10094, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVII, 100940O (17 February 2017); https://doi.org/10.1117/12.2253537
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KEYWORDS
Beam delivery

Optical fibers

Ultrafast phenomena

Head

Laser ablation

Laser processing

Silicon

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