Encompassing spatial frequency requirements in optical metrology

Richard N. Youngworth; Kathleen S. Youngworth

doi:10.1117/12.721152

14 May 2007 Encompassing spatial frequency requirements in optical metrology

Richard N. Youngworth, Kathleen S. Youngworth

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103160K (2007) https://doi.org/10.1117/12.721152
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

Traditionally, optical surface specifications have been given for figure and finish. Surface figure covered the low spatial frequencies and finish covered high spatial frequencies. Scratch/dig was used as a cosmetic specification for the quality of the surface. In the more recent past, advances in optical fabrication have enabled production of more complex surface shapes. This has led to a greater need to specify surfaces across a continual spatial frequency spectrum. In this paper we discuss metrology considerations and calculations necessary to produce surfaces to such requirements, including an example with measurements. The results are applicable to various surface specifications including amplitude spectral density, power spectral density, structure functions, or slope specification. The results also are applicable to a variety of optical metrology methods.

Citation Download Citation

Richard N. Youngworth and Kathleen S. Youngworth "Encompassing spatial frequency requirements in optical metrology", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160K (14 May 2007); https://doi.org/10.1117/12.721152

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