Thin-Film Compounds Formation With Pulsed Laser-Plasma Fluxes

S. M. Metev; M . S. Sendova

doi:10.1117/12.950626

18 May 1989 Thin-Film Compounds Formation With Pulsed Laser-Plasma Fluxes

S. M. Metev, M . S. Sendova

Proceedings Volume 1033, Trends in Quantum Electronics; (1989) https://doi.org/10.1117/12.950626
Event: International Conference on Trends in Quantum Electronics, 1988, Bucharest, Romania

Abstract

In the paper some of the specific features of the pulsed laser-plasma deposition method are discussed, which are important for the stoichiometric deposition of compound materials of determined thickness and structure. On the bases of some experimental investigations the optimum conditions for synthesis of some polycomponent materials are characterized.

Citation Download Citation

S. M. Metev and M . S. Sendova "Thin-Film Compounds Formation With Pulsed Laser-Plasma Fluxes", Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); https://doi.org/10.1117/12.950626

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