Presentation + Paper
23 August 2017 Application of MEMS-based x-ray optics as tuneable nanosecond choppers
Author Affiliations +
Abstract
Time-resolved synchrotron x-ray measurements often rely on using a mechanical chopper to isolate a set of x-ray pulses. We have started the development of micro electromechanical systems (MEMS)-based x-ray optics, as an alternate method to manipulate x-ray beams. In the application of x-ray pulse isolation, we recently achieved a pulse-picking time window of half a nanosecond, which is more than 100 times faster than mechanical choppers can achieve. The MEMS device consists of a comb-drive silicon micromirror, designed for efficiently diffracting an x-ray beam during oscillation. The MEMS devices were operated in Bragg geometry and their oscillation was synchronized to x-ray pulses, with a frequency matching subharmonics of the cycling frequency of x-ray pulses. The microscale structure of the silicon mirror in terms of the curvature and the quality of crystallinity ensures a narrow angular spread of the Bragg reflection. With the discussion of factors determining the diffractive time window, this report showed our approaches to narrow down the time window to half a nanosecond. The short diffractive time window will allow us to select single x-ray pulse out of a train of pulses from synchrotron radiation facilities.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pice Chen, Donald A. Walko, Il Woong Jung, Zhilong Li, Ya Gao, Gopal K. Shenoy, Daniel Lopez, and Jin Wang "Application of MEMS-based x-ray optics as tuneable nanosecond choppers", Proc. SPIE 10386, Advances in X-Ray/EUV Optics and Components XII, 103860M (23 August 2017); https://doi.org/10.1117/12.2273026
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Cited by 1 scholarly publication.
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KEYWORDS
X-rays

Microelectromechanical systems

Micromirrors

X-ray optics

EUV optics

Silicon

Synchrotrons

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