Nickel and palladium acetate and fulleren C60 are precursors of films in PVD process. FTIR spectroscopy was used to studied the molecular structure of film in every stage of preparation . The crystalline structure of these films was studied by X-ray diffraction. SEM (scanning electron microscopy) was applied to investigate film’s surface topography. |
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Carbon nanotubes
Chemical vapor deposition
Diffraction
FT-IR spectroscopy
Nickel
Palladium
Spectroscopy