Recent progress on the scalable fabrication of hybrid polymer/SiO2 nanophotonic cavity arrays with an encapsulated MoS2 film

Sebastian Hammer; Hans-Moritz Mangold; Ariana E. Nguyen; Dominic Martinez-Ta; Sahar Naghibi Alvillar; Ludwig Bartels; Hubert J. Krenner

doi:10.1117/12.2287126

23 February 2018 Recent progress on the scalable fabrication of hybrid polymer/SiO₂ nanophotonic cavity arrays with an encapsulated MoS₂ film

Sebastian Hammer, Hans-Moritz Mangold, Ariana E. Nguyen, Dominic Martinez-Ta, Sahar Naghibi Alvillar, Ludwig Bartels, Hubert J. Krenner

Author Affiliations +

Proceedings Volume 10534, 2D Photonic Materials and Devices; 105340E (2018) https://doi.org/10.1117/12.2287126
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We review¹ the fully-scalable fabrication of a large array of hybrid molybdenum disulfide (MoS₂) - silicon dioxide (SiO₂) one-dimensional (1D), freestanding photonic-crystal cavities (PCCs) capable of enhancement of the MoS₂ photoluminescence (PL) at the narrow cavity resonance. As demonstrated in our prior work [S. Hammer et al., Sci. Rep. 7, 7251 (2017)]¹, geometric mode tuning over the wide spectral range of MoS₂ PL can be achieved by changing the PC period. In this contribution, we provide a step-by-step description of the fabrication process and give additional detailed information on the degradation of MoS₂ by XeF₂ vapor. We avoid potential damage of the MoS₂ monolayer during the crucial XeF₂ etch by refraining from stripping the electron beam (e-beam) resist after dry etching of the photonic crystal pattern. The remaining resist on top of the samples encapsulates and protects the MoS₂ film during the entire fabrication process. Albeit the thickness of the remaining resists strongly depends on the fabrication process, the resulting encapsulation of the MoS₂ layer improves the confinement to the optical modes and gives rise to a potential enhancement of the light-matter interaction.

Citation Download Citation

Sebastian Hammer, Hans-Moritz Mangold, Ariana E. Nguyen, Dominic Martinez-Ta, Sahar Naghibi Alvillar, Ludwig Bartels, and Hubert J. Krenner "Recent progress on the scalable fabrication of hybrid polymer/SiO₂ nanophotonic cavity arrays with an encapsulated MoS₂ film", Proc. SPIE 10534, 2D Photonic Materials and Devices, 105340E (23 February 2018); https://doi.org/10.1117/12.2287126

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Molybdenum

Etching

Silicon

Finite-difference time-domain method

Nanophotonics

Chemical vapor deposition

Photonic crystals

Show All Keywords

Keywords/Phrases

Search In:

Publication Years