Paper
4 September 2018 Profile measurements for specular objects using binary-encoded patterns
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Abstract
A full-field method using fringe patterns to identify the profile of a specular surface is presented. A virtual image of the fringe pattern is formed by the specular surface. The specular surface deforms the image of fringe pattern. Thus, phase of the deformed fringes can be utilized to retrieve the profile of the inspected surface.
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Wei-Hung Su and Sih-Yue Chen "Profile measurements for specular objects using binary-encoded patterns", Proc. SPIE 10755, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications XII, 1075513 (4 September 2018); https://doi.org/10.1117/12.2323815
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KEYWORDS
Fringe analysis

Inspection

Mirrors

Binary data

Calibration

CCD cameras

3D metrology

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