Damage of Thermal Ink Jet Heaters by the Collapsing Vapor Bubble

Michael P. O'Horo

doi:10.1117/12.952791

6 July 1989 Damage of Thermal Ink Jet Heaters by the Collapsing Vapor Bubble

Michael P. O'Horo

Proceedings Volume 1079, Hard Copy Output; (1989) https://doi.org/10.1117/12.952791
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

This paper discusses the damage to various passivation layers protecting Thermal Ink Jet heaters by the collapsing vapor bubble. The heater damage experiments were performed in either the printhead operational mode or or in an "open pool" configuration. The heaters described are located in a printhead channel and the passivation materials tested were Si0₂, Si₃N₄, TiW and Ta. Optical and SEM micrographs detailing the initial and later stages of cavitation damage have been taken and a comparison of heater damage/failure as a function of pulse number obtained. A discussion of the damage mechanism for the various passivation materials and the effects of bubble collapse and consequent cavitation will be presented.

Citation Download Citation

Michael P. O'Horo "Damage of Thermal Ink Jet Heaters by the Collapsing Vapor Bubble", Proc. SPIE 1079, Hard Copy Output, (6 July 1989); https://doi.org/10.1117/12.952791

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