Paper
25 October 2018 Towards a fully integrated indium-phosphide membrane on silicon photonics platform
Vadim Pogoretskiy, Jorn P. van Engelen, Jos J. G. M. van der Tol, Yuqing Jiao
Author Affiliations +
Abstract
In this work we present an integrated platform based on an InP membrane adhesively bonded to a silicon wafer. The platform allows for flexible design of wafer scale active and passive nanophotonic circuits. Advantages of this platform are the flexible fabrication process, large variety of integrated active and passive devices in one photonic layer, high index contrast of devices and therefore small footprint of complex circuits. We demonstrated several building blocks and devices, fabricated in the platform: semiconductor optical amplifiers, lasers and several passive devices, exploiting the high index contrast. Potential of the platform offers the integration of novel high speed devices using regrowth approach.
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Vadim Pogoretskiy, Jorn P. van Engelen, Jos J. G. M. van der Tol, and Yuqing Jiao "Towards a fully integrated indium-phosphide membrane on silicon photonics platform", Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 1082308 (25 October 2018); https://doi.org/10.1117/12.2503544
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Semiconducting wafers

Modulators

Waveguides

Photonic crystals

Polymers

Silicon

Wafer bonding

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