The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer

Guanghua Yang; Yuejing Qi; Yu Wang; Zengxiong Lu; Jiani Su; Wei Qi; Bing Li

doi:10.1117/12.2505151

18 January 2019 The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer

Guanghua Yang, Yuejing Qi, Yu Wang, Zengxiong Lu, Jiani Su, Wei Qi, Bing Li

Author Affiliations +

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108390X (2019) https://doi.org/10.1117/12.2505151
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

In an aberration measurement for the lithographic projection lens based on the lateral shear interferometry, stage needs move tens of nanometers to do phase motion, and move tens of millimeters to shift field points. But the stage met the both requirements is very expensive. Usually using a fine stage fold on a coarse stage to meet the both requirements. Whereas this method has a difficult to overcome since the both stages hardly keep the same motion direction. This article proposes a method to measure the angle between the stages motion direction based on the dual-frequency laser interferometer by respectively moving the both stages and flowing the 45 degrees. The measurement accuracy able reach the 0.10 mrad and meet the aberration measurement requirement.

Citation Download Citation

Guanghua Yang, Yuejing Qi, Yu Wang, Zengxiong Lu, Jiani Su, Wei Qi, and Bing Li "The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108390X (18 January 2019); https://doi.org/10.1117/12.2505151

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