Transparent element surface measurement using binary pattern in phase-measuring deflectometry

Ruiyang Wang; Dahai Li

doi:10.1117/12.2527718

9 September 2019 Transparent element surface measurement using binary pattern in phase-measuring deflectometry

Ruiyang Wang, Dahai Li

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 111090P (2019) https://doi.org/10.1117/12.2527718
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

For on-line surface measurement of transparent optical elements, phase measuring deflectometry (PMD) is a very promising method. However, the parasitic reflection from the rear surface is an existing problem for PMD to measure transparent element. A parasitic reflection eliminating method using binary pattern is proposed, the principle of which is described in detail. And the proposed method is implemented on a transparent window glass with a thickness of about 10mm. The surface shape result shows a good agreement with the interferometer data with a sub-wavelength level accuracy.

Conference Presentation

Citation Download Citation

Ruiyang Wang and Dahai Li "Transparent element surface measurement using binary pattern in phase-measuring deflectometry", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090P (9 September 2019); https://doi.org/10.1117/12.2527718

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