Extreme ultraviolet laser ablation of solid targets

G. J. Tallents; S. A. Wilson; J. Lolley; V. Aslanyan; A. West; A. K Rossall; E. Solis-Meza; E. Wagenaars; C. S. Menoni; J. J. Rocca

doi:10.1117/12.2528736

9 September 2019 Extreme ultraviolet laser ablation of solid targets

G. J. Tallents, S. A. Wilson, J. Lolley, V. Aslanyan, A. West, A. K Rossall, E. Solis-Meza, E. Wagenaars, C. S. Menoni, J. J. Rocca

Author Affiliations +

Proceedings Volume 11111, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII; 1111106 (2019) https://doi.org/10.1117/12.2528736
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

A capillary laser with output in the extreme ultra-violet at wavelength 46.9 nm is used to ablate solid targets of parylene- N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 μm) with peak intensities 6 x 10⁹Wcm^-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10¹⁰ Wcm^-2 with a cylindrically symmetric focus.

Conference Presentation

Citation Download Citation

G. J. Tallents, S. A. Wilson, J. Lolley, V. Aslanyan, A. West, A. K Rossall, E. Solis-Meza, E. Wagenaars, C. S. Menoni, and J. J. Rocca "Extreme ultraviolet laser ablation of solid targets", Proc. SPIE 11111, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII, 1111106 (9 September 2019); https://doi.org/10.1117/12.2528736

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