CNT EUV pellicle: balancing options (Conference Presentation)

Emily E. Gallagher; Ivan Pollentier; Marina Y Timmermans; Marina Mariano Juste; Cedric Huyghebaert

doi:10.1117/12.2539262

17 October 2019 CNT EUV pellicle: balancing options (Conference Presentation)

Emily E. Gallagher, Ivan Pollentier, Marina Y Timmermans, Marina Mariano Juste, Cedric Huyghebaert

Proceedings Volume 11148, Photomask Technology 2019; 111480Z (2019) https://doi.org/10.1117/12.2539262
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

As EUV lithography wafer volumes increase, throughput and yield require more focus. Yield can be enhanced by introducing a pellicle to hold particles out of the focal plane and minimize their impact to imaging. Using a pellicle also minimizes the extra wafer inspections required to ensure that printable mask defects do not increase over time. However, if the associated transmission loss is high, the yield advantage is offset by reduced throughput. The CNT-based pellicle offers the advantage of very high EUV transmission. CNT pellicles have also demonstrated lifetime at 300W EUV scanner power. The challenge is balancing the CNT membrane design in three areas: physical presence/the ability to stop particles, EUV transmission/imaging impact, and lifetime in the scanner/thermal tolerance. Each of these areas will be described along with simulated and experimental data illustrating the value of a CNT-based EUV pellicle solution for the future.

Conference Presentation

Citation Download Citation

Emily E. Gallagher, Ivan Pollentier, Marina Y Timmermans, Marina Mariano Juste, and Cedric Huyghebaert "CNT EUV pellicle: balancing options (Conference Presentation)", Proc. SPIE 11148, Photomask Technology 2019, 111480Z (17 October 2019); https://doi.org/10.1117/12.2539262

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available