A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights

F. Senger; J. Albers; U. Hofmann; G. Piechotta; T. Giese; F. Heinrich; T. von Wantoch; S. Gu-Stoppel

doi:10.1117/12.2542802

28 February 2020 A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights

F. Senger, J. Albers, U. Hofmann, G. Piechotta, T. Giese, F. Heinrich, T. von Wantoch, S. Gu-Stoppel

Author Affiliations +

Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 1129305 (2020) https://doi.org/10.1117/12.2542802
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

This paper presents a 2D MEMS mirror for smart headlights, combing high-Q vacuum package with AR (Anti Reflecting)-coating, piezoelectric driving and Lissajous scanning. While the vacuum package protects the MEMS device and the AR-coating suppresses parasite reflections from the glass lid, the AlN-based piezoelectric actuators are robust against shock and vibration in harsh environment, comparing to fragile capacitive finger structures. This gimbal-less MEMS mirror with a large circular aperture (diameter = 5.5 mm) utilizes Lissajous scanning possessing two perpendicular torsion modes with frequencies of f_x = 2.26 kHz, f_y = 2.30 kHz fulfilling high light density and large total optical scanning angles of 55°, 30° at ± 40 V_AC. A 2D projection of 50° x 20° was realized, where the angle loss comparing to the 1D testing arose from pincushion distortion, whose effect was severely reduced by the redesign run. Due to the great long-term stability of AlN and protection of vacuum packages, the MEMS mirror also shows a good reliability. This paper will describe and discuss the design, fabrication and characterization results of this MEMS mirror.

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Citation Download Citation

F. Senger, J. Albers, U. Hofmann, G. Piechotta, T. Giese, F. Heinrich, T. von Wantoch, and S. Gu-Stoppel "A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129305 (28 February 2020); https://doi.org/10.1117/12.2542802

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