PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Interest in MEMS fabrication has been growing for the last 50 years; however, the number and quality of tools supporting rapid prototyping in this industry are limited. Laminated resin printing (LRP) combines maskless projector-based lithography with 3D printing techniques to facilitate the rapid production of high-resolution polymer structures in three dimensions with no retooling required. By selectively metalising these structures, high value functional MEMS devices can be rapidly produced, tested and iterated. Microcircuits, enclosed mechanical systems and devices based on cantilevers and membranes have all been demonstrated using this technique.
Harrison B. Jones,Ciaran P. Moore,Andrew D. Best,Andrea J. Bubendorfer, andNeil D. Glasson
"Rapid prototyping MEMS with laminated resin printing", Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129407 (28 February 2020); https://doi.org/10.1117/12.2542968
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Harrison B. Jones, Ciaran P. Moore, Andrew D. Best, Andrea J. Bubendorfer, Neil D. Glasson, "Rapid prototyping MEMS with laminated resin printing," Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129407 (28 February 2020); https://doi.org/10.1117/12.2542968