Near infrared filters for thermophotovoltaic(TPV) generators have been invested widely and different programs are proposed in terms of design and fabrication. However, system conversion efficiency is limited by their own drawbacks, although some of them are combined to solve these problems. Resonance Antenna Array Filters(RAA) is candidate for TPV system with high conversion efficiency, which is metal pattern with less than 150nm linewidth. Under the existing technological conditions, there are large fabrication deviation, which will make the expected filtering characteristics offset and hardly meet the requirements. In this paper, a finite element method(FEM) combined with TPV model in practice is built to design the geometric characteristics of RAA filters in order to achieve high system efficiency, including square-loop, circular rings and cross slots. The results show that slot aspect is the main parameters affecting the filtering characteristics, and the fabrication with 10% deviation can meet the requirements of the design value. In addition, high-order harmonics exist in all three groove structures near 700nm wavelength. This paper proposes a circle ring with specific structure to effectively suppress the harmonics, which is helpful to improve the conversion efficiency of thermophotovoltaic system.
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