Échelle grating with improved polarization characteristics used for Earth observation

Susann Sadlowski; Torsten Harzendorf; Stefan Schwinde; Frank Burmeister; Dirk Michaelis; Thomas Flügel-Paul; Uwe Zeitner

doi:10.1117/12.2562546

13 December 2020 Échelle grating with improved polarization characteristics used for Earth observation

Susann Sadlowski, Torsten Harzendorf, Stefan Schwinde, Frank Burmeister, Dirk Michaelis, Thomas Flügel-Paul, Uwe Zeitner

Author Affiliations +

Proceedings Volume 11451, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV; 114511D (2020) https://doi.org/10.1117/12.2562546
Event: SPIE Astronomical Telescopes + Instrumentation, 2020, Online Only

Abstract

An Èchelle-grating specifically developed for the space borne measurement of earth’s atmospheric CO₂-concentration is presented. It has a line density of ~170L/mm and is manufactured on a thick crystalline silicon substrate using electron beam lithography. The echelle profile is realized using a highly anisotropic chemical etching process, which stops on the <111> crystallographic planes of the crystal. The established manufacturing process allows perfect linear grating facets with negligible corner rounding of the profile. The important property of showing a low polarization sensitivity of the diffraction efficiency is achieved by a special design and technology for applying the gold coating of the grating which intentionally leaves one grating facet uncoated.

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Citation Download Citation

Susann Sadlowski, Torsten Harzendorf, Stefan Schwinde, Frank Burmeister, Dirk Michaelis, Thomas Flügel-Paul, and Uwe Zeitner "Échelle grating with improved polarization characteristics used for Earth observation", Proc. SPIE 11451, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV, 114511D (13 December 2020); https://doi.org/10.1117/12.2562546

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