Characterization of low-loss hydrogenated amorphous silicon ﬁlms for superconducting resonators

B. T. Buijtendorp; J. Bueno; D. J. Thoen; V. Murugesan; P. M. Sberna; J. J. A. Baselmans; S. Vollebregt; A. Endo

doi:10.1117/12.2562233

13 December 2020 Characterization of low-loss hydrogenated amorphous silicon ﬁlms for superconducting resonators

B. T. Buijtendorp, J. Bueno, D. J. Thoen, V. Murugesan, P. M. Sberna, J. J. A. Baselmans, S. Vollebregt, A. Endo

Proceedings Volume 11453, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X; 114532X (2020) https://doi.org/10.1117/12.2562233
Event: SPIE Astronomical Telescopes + Instrumentation, 2020, Online Only

Conference Poster

Abstract

Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10⁻⁵ for a resonator energy of 10⁵ photons, at 120 mK and 4–7 GHz. This makes these films promising for microwave kinetic inductance detectors and on-chip millimeter-submilimeter filters.

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B. T. Buijtendorp, J. Bueno, D. J. Thoen, V. Murugesan, P. M. Sberna, J. J. A. Baselmans, S. Vollebregt, and A. Endo "Characterization of low-loss hydrogenated amorphous silicon ﬁlms for superconducting resonators", Proc. SPIE 11453, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X, 114532X (13 December 2020); https://doi.org/10.1117/12.2562233

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