Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope

L. H. Robins; L. P. Cook; E. N. Farabaugh; A. Feldman

doi:10.1117/12.962074

15 January 1989 Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope

L. H. Robins, L. P. Cook, E. N. Farabaugh, A. Feldman

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962074
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Optically active defects in diamond films grown by the hot-filament chemical vapor deposition method were investigated by cathodoluminescence (CL) imaging and spectroscopy in a scanning electron microscope. A set of films grown on silicon substrates at deposition temperatures (Td) from 600°C to 850° C was studied. The spatial resolution of the CL images was approximately 0.2 to 0.5 μm; CL spectra were measured with wavelength resolution 0.4 nm in the wavelength range 350 to 900 nm.

Citation Download Citation

L. H. Robins, L. P. Cook, E. N. Farabaugh, and A. Feldman "Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962074

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