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Especially at grazing angles of incidence off-plane diffraction from blazed gratings is more efficient than in-plane diffraction. It will here be discussed, whether a soft X-ray monochromator employing such gratings can achieve competetive high spectral resolving power.
Werner H. Jark
"Conditions in which off-plane diffraction can efficiently provide high spectral resolving power in EUV/soft x-ray monochromators", Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 1149107 (21 August 2020); https://doi.org/10.1117/12.2568660
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Werner H. Jark, "Conditions in which off-plane diffraction can efficiently provide high spectral resolving power in EUV/soft x-ray monochromators," Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 1149107 (21 August 2020); https://doi.org/10.1117/12.2568660