Advances In Multilayer X-Ray/EUV Optics: Synthesis, Performance And Instrumentation

Troy W. Barbee Jr.

doi:10.1117/12.962618

27 November 1989 Advances In Multilayer X-Ray/EUV Optics: Synthesis, Performance And Instrumentation

Troy W. Barbee Jr.

Proceedings Volume 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics; (1989) https://doi.org/10.1117/12.962618
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The field of multilayer optics for the X-ray, Soft X-ray and extreme ultra violet is maturing at a rapid pace. There are more than fourty groups worldwide actively working in this area. A large part of these efforts are directed to improving the quality of multilayer structures by developing a better understanding of the synthesis-structure-property relationships. Although the quality of multilayer structures may be substantially improved there are now significant instruemental apllications for these reflecting optics. In this paper the current status of this field is discussed.

Citation Download Citation

Troy W. Barbee Jr. "Advances In Multilayer X-Ray/EUV Optics: Synthesis, Performance And Instrumentation", Proc. SPIE 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics, (27 November 1989); https://doi.org/10.1117/12.962618

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