Metrology of thin layer deposition with combined XRR-GIXRF analysis at SOLEIL synchotron

Y. Ménesguen; M.-C. Lépy

doi:10.1117/12.2583702

22 February 2021 Metrology of thin layer deposition with combined XRR-GIXRF analysis at SOLEIL synchotron

Y. Ménesguen, M.-C. Lépy

Proceedings Volume 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV; 116110I (2021) https://doi.org/10.1117/12.2583702
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity (XRR) measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence (TXRF) related techniques such as grazing incidence XRF (GIXRF). The instrument is now routinely installed on the hard X-ray branch of the Metrology beamline and reproducibility is studied as well as reference-free GIXRF analysis. Some representative examples are given to illustrate the capabilities of the setup and of the analysis.

Conference Presentation

Citation Download Citation

Y. Ménesguen and M.-C. Lépy "Metrology of thin layer deposition with combined XRR-GIXRF analysis at SOLEIL synchotron", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 116110I (22 February 2021); https://doi.org/10.1117/12.2583702

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