Author Affiliations +
Aiwen Wu,1 Harvey Tang,2 Gregg Conner,1 Shu Hao Chang,3 Gaetano Giordano,3 Dominick Smiddy,4 Mark Geniza,4 Benjamin L. Clark4
1Entegris, Inc. (United States)
2Entegris Singapore Pte., Ltd. (Taiwan)
3Inpria Corp. at imec (Belgium)
4Inpria Corp. (United States)