Presentation + Paper
5 March 2021 Simultaneous recovery of phase and defocus from coherent through-focus intensity images
Author Affiliations +
Abstract
Phase retrieval methods have been proposed to recover phase from through-focus intensity images measured on a microscope. It requires measuring the defocus distances of intensity images, usually by a z-axis translation stage. However, it complicates the experiment, adds expense, and suffers from error in the z-stage measurement. In this paper, we propose an algorithm to recover phase from only through-focus intensity images without measuring extra parameters such as defocus, wavelength and pixel size. We formulate the phase retrieval as a least-square error optimization problem and propose an alternating update scheme to solve the nonconvex optimization problem. We validate the algorithm with simulation and experiment.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingshan Zhong, Emrah Bostan, Dihong Tian, and Laura Waller "Simultaneous recovery of phase and defocus from coherent through-focus intensity images", Proc. SPIE 11653, Quantitative Phase Imaging VII, 116530Z (5 March 2021); https://doi.org/10.1117/12.2575823
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KEYWORDS
Imaging systems

Phase imaging

Inspection

Lithographic illumination

Lithography

Microscopes

Optical inspection

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