Quasi-static PZT actuated MEMS mirror with 4x3mm2 reflective area and high robustness

N. Boni; R. Carminati; G. Mendicino; M. Merli

doi:10.1117/12.2576526

5 March 2021 Quasi-static PZT actuated MEMS mirror with 4x3mm² reflective area and high robustness

N. Boni, R. Carminati, G. Mendicino, M. Merli

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 1169708 (2021) https://doi.org/10.1117/12.2576526
Event: SPIE OPTO, 2021, Online Only

Abstract

Piezoelectric thin films have gained attention as key materials for the actuation of micro devices since they provide high drive forces compared to others actuation mechanisms. One of the most challenging application field is the design of quasistatic MEMS scanners, in which is difficult to have a high torsional angle and large reflective area while maintaining a good device robustness. In this work a monoaxial, quasi-static MEMS mirror with PZT actuation will be presented, surpassing the limitations found in the state-of-the-art solutions. The mirror has a large reflective area in the visible spectrum (4x3mm with aluminum coating) and the half mechanical opening angle is of 9deg (corresponding to a field of view of 36deg) with a relatively low actuation voltage (40V). To enable the mirror control, a diffused piezoresistive sensor in a Wheatstone bridge configuration is integrated in the technology platform. The innovative mirror design guarantees high resonant frequencies of the torsional mode (>500Hz) and higher spurious modes (>2.5kHz), which allow a quasistatic actuation for the typical display refresh rates (up to 120Hz). The high frequencies of the translational spurious modes guarantee a high robustness against shocks and vibrations, which makes this mirror suitable for consumer or automotive products. In this paper it will be described the working principle of the patented MEMS design, the manufacturing process, the FEM simulations and the experimental findings obtained on fabricated samples.

Conference Presentation

Citation Download Citation

N. Boni, R. Carminati, G. Mendicino, and M. Merli "Quasi-static PZT actuated MEMS mirror with 4x3mm² reflective area and high robustness", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 1169708 (5 March 2021); https://doi.org/10.1117/12.2576526

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