An silicon-based integrated ultraviolet light visible light and near-infrared light hybrid detector

Shaohua Zhou; Deqiang Ding; Yuan Li

doi:10.1117/12.2590699

18 March 2021 An silicon-based integrated ultraviolet light visible light and near-infrared light hybrid detector

Shaohua Zhou, Deqiang Ding, Yuan Li

Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 117801I (2021) https://doi.org/10.1117/12.2590699
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China

Abstract

This paper presents an silicon-based integrated hybrid detector that can perform the tasks of ultraviolet (UV) light detecting, visible (VIS) light detecting and near-infrared (NIR) light detecting. The detector is based on hybrid photodiodes that uses a vertical p+/N-well/Deep p-well/n-sub junction photodiodes which are available in CMOS processes, and can be configured to work as UV light detector, VIS light detector or NIR light detector in variable light environment by the using of transimpedance amplifier(TIA), subtractor(SUB), comparator and some simple switch logic gates. Device theory, structures, doping profiles and simulations are presented to verify the concept and feasibility. The simulation results show that the three photodiodes present different spectral responses, and dark current is as low as 10^-14A, and the optical signal of different wavelength can be effective detected with a high sensitivity and selectivity.

Citation Download Citation

Shaohua Zhou, Deqiang Ding, and Yuan Li "An silicon-based integrated ultraviolet light visible light and near-infrared light hybrid detector", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 117801I (18 March 2021); https://doi.org/10.1117/12.2590699

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available