Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele; Inho Choi; Saeid Kheiryzadehkhanghah; Daesuk Kim

doi:10.1117/12.2592650

20 June 2021 Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

Vamara Dembele, Inho Choi, Saeid Kheiryzadehkhanghah, Daesuk Kim

Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 117830N (2021) https://doi.org/10.1117/12.2592650
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO₂ thin film with a nominal thickness of 500 nm deposited on Si bare wafer.

Conference Presentation

Citation Download Citation

Vamara Dembele, Inho Choi, Saeid Kheiryzadehkhanghah, and Daesuk Kim "Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 117830N (20 June 2021); https://doi.org/10.1117/12.2592650

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available