0.33 NA EUV systems for high-volume manufacturing

Christophe Smeets; Roderik Van Es; Roelof De Graaf; Leon Levasier; Marcel Mastenbroek; Eric Verhoeven

doi:10.1117/12.2600961

30 September 2021 0.33 NA EUV systems for high-volume manufacturing

Christophe Smeets, Roderik Van Es, Roelof De Graaf, Leon Levasier, Marcel Mastenbroek, Eric Verhoeven

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021; 1185404 (2021) https://doi.org/10.1117/12.2600961
Event: SPIE Photomask Technology + EUV Lithography, 2021, Online Only

Abstract

ASML NXE:3400 scanners are now commonly used for High Volume Manufacturing (HVM) of 7nm and 5nm logic devices as well as D1z memory devices. This year, ASML has introduced the NXE:3600D scanner to the market, targeting 3nm logic and D1a and D1b nodes. In this paper we will share the latest performance of these systems, including excellent overlay, critical dimension (CD) control, stability, reliability, and high productivity. Furthermore, we will address the ASML roadmap for meeting the requirements for the 2 nm node and beyond.

Conference Presentation

Citation Download Citation

Christophe Smeets, Roderik Van Es, Roelof De Graaf, Leon Levasier, Marcel Mastenbroek, and Eric Verhoeven "0.33 NA EUV systems for high-volume manufacturing", Proc. SPIE 11854, International Conference on Extreme Ultraviolet Lithography 2021, 1185404 (30 September 2021); https://doi.org/10.1117/12.2600961

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available