A study on sputtered ultrathin chromium films for optical applications

Alexandr Belosludtsev; Anna Sytchkova; Kazimieras Baltrusaitis; Tatjana Gric

doi:10.1117/12.2604097

13 September 2021 A study on sputtered ultrathin chromium films for optical applications

Alexandr Belosludtsev, Anna Sytchkova, Kazimieras Baltrusaitis, Tatjana Gric

Author Affiliations +

Proceedings Volume 11872, Advances in Optical Thin Films VII; 118720N (2021) https://doi.org/10.1117/12.2604097
Event: SPIE Optical Systems Design, 2021, Online Only

Abstract

Structural, optical, and electrical properties of ultrathin chromium films manufactured using magnetron sputtering were investigated. The films showed pure metallic chromium phase yet their refractive index and extinction coefficient result very different from previously reported in literature. Structural, electrical and optical properties of ultrathin chromium layers are discussed in detail. The obtained optical constants of ultrathin chromium films show a specific trend with the film thickness increase. Precise knowledge of optical constants of ultrathin chromium films is important for many electro-optical and optical applications.

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Alexandr Belosludtsev, Anna Sytchkova, Kazimieras Baltrusaitis, and Tatjana Gric "A study on sputtered ultrathin chromium films for optical applications", Proc. SPIE 11872, Advances in Optical Thin Films VII, 118720N (13 September 2021); https://doi.org/10.1117/12.2604097

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