A high-performance humidity sensor based on in-PCB interdigitated electrodes

Yishu Wang; Yangyang Zhang; Zhou Zheng; Zhendong Sun; Xiaomin Wang; Xu Kong

doi:10.1117/12.2602905

2 July 2021 A high-performance humidity sensor based on in-PCB interdigitated electrodes

Yishu Wang, Yangyang Zhang, Zhou Zheng, Zhendong Sun, Xiaomin Wang, Xu Kong

Proceedings Volume 11887, International Conference on Sensors and Instruments (ICSI 2021); 1188707 (2021) https://doi.org/10.1117/12.2602905
Event: International Conference on Sensors and Instruments 2021, 2021, Qingdao, China

Abstract

This paper presents a low-cost and high-performance humidity sensor based on interdigitated electrodes (IDE). Compared to common IDE sensors with such substrates as silicon, ceramic, polyimide, and polyethylene terephthalate (PET), the proposed sensor employs printed circuit board (PCB) as the substrate, offering easy electrical connection to the readout circuit and great potential as a low-cost and highly integrated sensing platform. The IDE sensor with eight pairs of comb-like twin electrodes is designed and fabricated on a PCB by the standard PCB manufacturing process. A mixture of dielectric graphene oxide and conductive MXene has been used as the moisture sensing material due to its strong hydrophilicity and tunable conductivity. Upon functionalization by the sensing material, the IDE structure achieves the capability of converting changes in the relative humidity (RH) into resistance shifts. The resistive response of the sensor to the varying RH levels from 11% to 84% has been evaluated. The sensor exhibits a high RH sensitivity of 1.245%/%RH, and also fast response/recovery and low hysteresis.

Citation Download Citation

Yishu Wang, Yangyang Zhang, Zhou Zheng, Zhendong Sun, Xiaomin Wang, and Xu Kong "A high-performance humidity sensor based on in-PCB interdigitated electrodes", Proc. SPIE 11887, International Conference on Sensors and Instruments (ICSI 2021), 1188707 (2 July 2021); https://doi.org/10.1117/12.2602905

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