Etching of masters for SRG nanoimprint with varying slant angle and depth

Mandy Göring

doi:10.1117/12.2632480

7 March 2022 Etching of masters for SRG nanoimprint with varying slant angle and depth

Mandy Göring

Proceedings Volume 11932, SPIE AR, VR, MR Industry Talks 2022; 119320E (2022) https://doi.org/10.1117/12.2632480
Event: SPIE AR VR MR, 2022, San Francisco, California, United States

Abstract

In order to fabricate lightweight near eye displays for AR application, surface relief gratings are used for coupling the light from the source into the light guide and out of the light guide towards the eye. To suppress higher diffraction orders and thus maximize the light yield those gratings are slanted. Reactive Ion Beam Trimming (RIBT) was used for fabrication of surface relief gratings with both varying slant angle and varying trench depth on a master stamp. The substrate had been covered with a hard mask providing the basic grating geometry such as period and duty cycle. Localized ion beam etching was applied to etch the trenches for the grating. Varying the ion irradiation dose (by means of dwell time variation) defines the trench depth on a local level. The angle of incidence of the ion beam directly transfers into the substrate as the slant angle and can be varied independently of the dwell time, providing the unique possibility to achieve a continuous variation of the slant angle across one die. In a later step, nanoimprint lithography can be used for replication.

Conference Presentation

Citation Download Citation

Mandy Göring "Etching of masters for SRG nanoimprint with varying slant angle and depth", Proc. SPIE 11932, SPIE AR, VR, MR Industry Talks 2022, 119320E (7 March 2022); https://doi.org/10.1117/12.2632480

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