Propagation loss measurements in sputter coated titanium oxide waveguides

A. Aguirre Fontenla; I. Hegeman; W. A. P. M. Hendriks; C. E. Osornio-Martínez; M. Dijkstra; S. M. García-Blanco

doi:10.1117/12.2610616

5 March 2022 Propagation loss measurements in sputter coated titanium oxide waveguides

A. Aguirre Fontenla, I. Hegeman, W. A. P. M. Hendriks, C. E. Osornio-Martínez, M. Dijkstra, S. M. García-Blanco

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Proceedings Volume 12004, Integrated Optics: Devices, Materials, and Technologies XXVI; 1200403 (2022) https://doi.org/10.1117/12.2610616
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

TiO₂ is a very promising material for integrated photonics due to its high refractive index (~2.3 at 633 nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO₂ channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1 dB/cm for wavelengths above 633 nm and channel losses of 1-1.5 dB/cm at 1550 nm.

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A. Aguirre Fontenla, I. Hegeman, W. A. P. M. Hendriks, C. E. Osornio-Martínez, M. Dijkstra, and S. M. García-Blanco "Propagation loss measurements in sputter coated titanium oxide waveguides", Proc. SPIE 12004, Integrated Optics: Devices, Materials, and Technologies XXVI, 1200403 (5 March 2022); https://doi.org/10.1117/12.2610616

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