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13 December 2021 Research of thin film damage testing based on photothermal deflection
Guanwen Chen, Lihong Yang, Yinzi Wu, Menghan Li, Zechen Xue
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Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 1207107 (2021) https://doi.org/10.1117/12.2604821
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China
Abstract
Laser damage identification is one of the hot research issues in recent years. Based on the mechanism of photothermal deflection, this paper established a physical model of reflective photothermal deflection based on laser damage.And designed an experimental test system for offset recognition based on the photothermal deflection method of the four-quadrant detector.The damage test of SiO2 film was carried out by the "1-0n-1" method specified by the national standard. The probe beam offset under different energies was studied, and the change trend of the detected beam offset during the damage of SiO2 film was analyzed.The optical properties and damage morphology of the samples were studied, and the damage threshold of SiO2 film was determined by zero probability damage threshold method.The experimental results show that when the SiO2 film is damaged by the photothermal deflection damage identification system based on the quadrant detector, when the offset is greater than 0.1mm, the SiO2 film is considered to be damaged, and the damage threshold is 12.7 J /cm2.The deviation of the test result based on the photothermal deflection damage offset of the four-quadrant detector and the test result of the phase contrast microscope method in the international standard ISO11254 is not more than 6.8%.
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Guanwen Chen, Lihong Yang, Yinzi Wu, Menghan Li, and Zechen Xue "Research of thin film damage testing based on photothermal deflection", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 1207107 (13 December 2021); https://doi.org/10.1117/12.2604821
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KEYWORDS
Sensors
Silica
Laser damage threshold
Thin films
Laser beam diagnostics
Signal detection
Standards development
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