Paper
1 July 1990 Graded-effective-index waveguiding structures fabricated with laser processing
Mark N. Ruberto, Robert Scarmozzino, Alan Eli Willner, Dragan V. Podlesnik, Richard M. Osgood Jr.
Author Affiliations +
Proceedings Volume 1215, Digital Optical Computing II; (1990) https://doi.org/10.1117/12.18098
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
The technique of laser direct-writing was used to fabricate low-loss, rib-like waveguides on GaAs/A1GaAs material. Since this is a inaskless fabrication process, laser-etched structures such as bends, tapers, and Y-branches are readily demonstrated. The ability to smoothly control the etch depth, and thus the effective index of refraction across the wafer, was used to make a compact directional coupler. Finally, the reduction of losses in waveguide tapers and bends by grading the effective index will be discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark N. Ruberto, Robert Scarmozzino, Alan Eli Willner, Dragan V. Podlesnik, and Richard M. Osgood Jr. "Graded-effective-index waveguiding structures fabricated with laser processing", Proc. SPIE 1215, Digital Optical Computing II, (1 July 1990); https://doi.org/10.1117/12.18098
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Cited by 8 scholarly publications and 2 patents.
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KEYWORDS
Waveguides

Etching

Optical computing

Refraction

Gallium arsenide

Laser processing

Directional couplers

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