Research on the properties of Ta2O5 optical films prepared with APS plasma assisted deposition

Yong-gang Pan; Zheng Liu; Wen-cheng Liu; Mian Li; Si-bao Zhang; Chang-xin Luo; Chun-juan Zhang

doi:10.1117/12.2604831

15 February 2022 Research on the properties of Ta₂O₅ optical films prepared with APS plasma assisted deposition

Yong-gang Pan, Zheng Liu, Wen-cheng Liu, Mian Li, Si-bao Zhang, Chang-xin Luo, Chun-juan Zhang

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216602 (2022) https://doi.org/10.1117/12.2604831
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Ta₂O₅ thin films are widely used in optical and microelectronic industry because of its superior optical and mechanical properties. In this paper, single-layer Ta₂O₅ thin films were prepared by APS plasma assisted electron beam evaporation deposition. Based on the theory of ion energy transfer, the selection criteria of APS process parameters were established. By optimizing APS source parameters, Ta₂O₅ thin films with different characteristics were prepared. The spectral and refractive index dispersion of Ta₂O₅ thin films were analyzed by Cary7000 spectrophotometer. The stress and surface roughness of Ta₂O₅ films were analyzed by Zygo interferometer. Experiment and analysis results showed that the characteristics of Ta₂O₅ thin films are closely related to APS plasma assisted processing parameters. The discharge current and bias voltage of APS source have great influence on the stress and surface roughness of Ta₂O₅ thin films, but have little influence on the spectral characteristics and refractive index dispersion. The influences of preparation parameters on the properties of Ta₂O₅ thin films were analyzed and optimization fabrication parameters were obtained.

Citation Download Citation

Yong-gang Pan, Zheng Liu, Wen-cheng Liu, Mian Li, Si-bao Zhang, Chang-xin Luo, and Chun-juan Zhang "Research on the properties of Ta₂O₅ optical films prepared with APS plasma assisted deposition", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216602 (15 February 2022); https://doi.org/10.1117/12.2604831

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available