CUBES: prototyping the high efficiency UV transmission grating

Uwe D. Zeitner; Thomas Flüegel-Paul; Jan Nathanael; Kristin Gerold; Marcus Trost

doi:10.1117/12.2628258

29 August 2022 CUBES: prototyping the high efficiency UV transmission grating

Uwe D. Zeitner, Thomas Flüegel-Paul, Jan Nathanael, Kristin Gerold, Marcus Trost

Proceedings Volume 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V; 121884Y (2022) https://doi.org/10.1117/12.2628258
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Abstract

The development of a small size prototype of a UV-grating for the CUBES instrument of ESO’s VLT is presented. It has a line density of 3600 l/mm and is manufactured on a fused-silica substrate using electron-beam lithography, reactive ion etching and atomic layer deposition. In the ideal case the grating has a pure lamellar profile with a groove width in the range of 100nm only. To achieve a high polarization independent diffraction efficiency the grating depth is required to be in the range of 700nm and the duty cycle needs to be met with an accuracy in the nm-range. To achieve this high aspect ratio with sufficient accuracy a trimming process based on a conformal overcoating by ALD is performed.

Citation Download Citation

Uwe D. Zeitner, Thomas Flüegel-Paul, Jan Nathanael, Kristin Gerold, and Marcus Trost "CUBES: prototyping the high efficiency UV transmission grating", Proc. SPIE 12188, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V, 121884Y (29 August 2022); https://doi.org/10.1117/12.2628258

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