Ulf Griesmann,1 Keiko Munechika,2 T. Brian Renegar,1 X. Alan Zheng,1 Johannes A. Soons,1 Thomas A. Germerhttps://orcid.org/0000-0003-4078-3508,1 Weilun Chao,3 Ian Lacey,3 Carlos Pina-Hernandez,2 Peter Z. Takacs,4 Valeriy V. Yashchuk3
1National Institute of Standards and Technology (United States) 2HighRI Optics, Inc. (United States) 3Lawrence Berkeley National Lab. (United States) 4Surface Metrology Solutions, LLC (United States)
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Accurate topography measurements of engineered surfaces over a wide range of spatial frequencies are required in many applications. The instrument transfer function (ITF) of the microscope used to characterize the surface topography must be taken into consideration to ensure that the height, or depth, of features with higher spatial frequency content is not underestimated. This applies especially when comparing surface topography measurements made by different types of microscopes. We discuss ITF measurements of a confocal microscope and an interferometric microscope using a binary pseudo-random array (BPRA) standard. BPRA standards are surfaces designed to have constant inherent power spectral density (PSD) over the spatial frequency passband of a microscope. The ITF of a microscope can thus be derived from a PSD measurement of a BPRA standard in a straight-forward manner. We further show how BPRA standards can be used as efficient diagnostic tools to characterize aspects of the imaging performance of topography-measuring microscopes.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Ulf Griesmann, Keiko Munechika, T. Brian Renegar, X. Alan Zheng, Johannes A. Soons, Thomas A. Germer, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Z. Takacs, Valeriy V. Yashchuk, "Characterization of surface texture-measuring optical microscopes using a binary pseudo-random array standard," Proc. SPIE 12223, Interferometry XXI, 1222306 (3 October 2022); https://doi.org/10.1117/12.2633411