The new ESRF compact multilayer coating system

Ch. Morawe; P. Bras; C. Guilloud; S. Labouré; J-Ch. Peffen

doi:10.1117/12.2632702

4 October 2022 The new ESRF compact multilayer coating system

Ch. Morawe, P. Bras, C. Guilloud, S. Labouré, J-Ch. Peffen

Proceedings Volume 12240, Advances in X-Ray/EUV Optics and Components XVII; 1224002 (2022) https://doi.org/10.1117/12.2632702
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

The ESRF X-ray Optics Group is in the process of commissioning of a new Compact Multilayer Coating System (CMCS). With the arrival of the new ESRF Extremely Brilliant Source (EBS), many beamlines operate with smaller beams that require shorter but more precise optical elements. The existing Large Multilayer Coating System (LMCS) can coat multilayer (ML) optics up to 1 m long but is not optimized to deal with very short optics. Consequently, a new machine was designed and built that provides better accuracy to cope with smaller mirrors and tighter tolerances. The CMCS will also be employed to correct figure errors using differential deposition techniques. Similar to the LMCS, the CMCS is based on non-reactive magnetron sputtering. The machine is equipped with 4 circular cathodes. A linear substrate motion will enable coatings up to 300 mm long and 80 mm wide. This work will describe the basic concept of the machine and will provide an overview of the operation conditions. It will be complemented by initial results obtained during the commissioning period.

Citation Download Citation

Ch. Morawe, P. Bras, C. Guilloud, S. Labouré, and J-Ch. Peffen "The new ESRF compact multilayer coating system", Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 1224002 (4 October 2022); https://doi.org/10.1117/12.2632702

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KEYWORDS

Coating

Multilayers

Thin films

X-ray optics

Particles

Optical components

X-rays

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