Simulation of spectral confocal microscopy system

Haiqi Li; Jun Zhang; Zhe Chen; Jinfeng Wang

doi:10.1117/12.2616488

26 July 2022 Simulation of spectral confocal microscopy system

Haiqi Li, Jun Zhang, Zhe Chen, Jinfeng Wang

Proceedings Volume 12279, 2021 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 122790Q (2022) https://doi.org/10.1117/12.2616488
Event: 2021 International Conference on Optical Instruments and Technology, 2022, Online Only

Abstract

As a kind of non-contact displacement sensor modulated by wavelength, spectral confocal microscopy system has high measurement accuracy and is insensitive to object tilt and surface texture, and has strong anti-stray light ability, which makes it become a hotspot of current research. The traditional spectral confocal microscopy system uses a wide-spectrum light source to illuminate the pinhole and dispersion objective lens to generate dispersion on one side of the measured object. The dispersion objective lens focuses the light of different wavelengths at different positions of the optical axis, converts the displacement information into wavelength information, and detects the reflected spectral information by CCD industrial camera or spectrometer to determine the peak wavelength of the focused light on the object surface, Thus, the axial distance information of the object surface to be measured is obtained. In this paper, based on the analysis of the traditional confocal microscopic system, a linear dispersion objective lens of the confocal microscopic system was designed. The axial dispersion of 3.228mm was achieved in the wavelength range of 450nm to 650nm, and the linear determination coefficient between axial dispersion and wavelength was greater than R²=0.9859.On this basis, a dual-optical path detection structure based on edge light is designed. By adding three impurity filters to filter stray light except the target wavelength, the results show that the new spectral confocal light path has high sensitivity, small stray light and strong anti-interference ability.

Citation Download Citation

Haiqi Li, Jun Zhang, Zhe Chen, and Jinfeng Wang "Simulation of spectral confocal microscopy system", Proc. SPIE 12279, 2021 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 122790Q (26 July 2022); https://doi.org/10.1117/12.2616488

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KEYWORDS

Confocal microscopy

Objectives

Lens design

Sensors

Light sources

Stray light

Light

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