Reflective grazing incidence EUV nanoscope for wafer metrology

Tao Shen; Yasin Ekinci; Iacopo Mochi

doi:10.1117/12.2641776

1 December 2022 Reflective grazing incidence EUV nanoscope for wafer metrology

Tao Shen, Yasin Ekinci, Iacopo Mochi

Proceedings Volume 12292, International Conference on Extreme Ultraviolet Lithography 2022; 122920O (2022) https://doi.org/10.1117/12.2641776
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

EUV lithography is currently being used in semiconductor high volume manufacturing, however, performing non-destructive metrology at the nanoscale for different types of structures and materials is still an extremely challenging task. The EUV reflective grazing incidence nanoscope (REGINE) is a new synchrotron end-station dedicated to non-destructive EUV metrology at the nanoscale for surface/layered structures with different material compositions. REGINE is being developed at the Swiss Light Source synchrotron and aims to enable grazing-incidence coherent diffraction imaging (CDI), scatterometry, and reflectometry in the energy range of 80 to 200 eV. In this work, we present the concept of the REGINE tool and the results of its commissioning experiments.

Conference Presentation

Citation Download Citation

Tao Shen, Yasin Ekinci, and Iacopo Mochi "Reflective grazing incidence EUV nanoscope for wafer metrology", Proc. SPIE 12292, International Conference on Extreme Ultraviolet Lithography 2022, 122920O (1 December 2022); https://doi.org/10.1117/12.2641776

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