Optical elements are the main parts in laser system, which limit the total generated output power due to optical resistivity. The increase of beam diameter dimensions may compensate the optical performance of elements, however it leads to the increase of laser system size. Thus, any improvement in optical coatings has impact on either higher output power or lowering the size of system itself. Glancing angle deposition method is presented to produce porous nanostructured coatings, which are characterized by low inner stress. Multilayer Bragg mirrors are formed using only silica material to achieve high laser-induced damage threshold value. Laser conditioning effect is applied, to improve optical performance in ns regime and reach LIDT values over 180 J/cm2.
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