Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope

Sen Zhou; Jian Xu; Ying Li; Cong Yue

doi:10.1117/12.2645474

19 December 2022 Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope

Sen Zhou, Jian Xu, Ying Li, Cong Yue

Author Affiliations +

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190Q (2022) https://doi.org/10.1117/12.2645474
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Scanning electron microscope have been widely studied in academia and applied in engine wear monitoring, geology, air cleanliness and pollution, because of the benefits of fast massive acquisition of nano-scale features, non-contact operation, and automatic data processing. It is important to have an automated analysis ability to get a deeper understanding on geometric features of multi-regulars shape of different particles, thus offering a significantly enhanced user experience and higher measurement accuracy. Hence, it should be carried out geometric measurement error tests before using. In this paper, several different shapes of particle were introduced to test geometric measurement error on a commercial SEM with specific particle analysis software. Several experimental cases have been designed by considered of practical application and user habits. Specially, the distinguish accuracy rate of a single threshold and multiple threshold were respectively tested by different types of particles. On the other hand, the ability of automatically classification schemes using the chemical and morphological information was taken in account too. Our scope was indeed narrow, but intentionally so. Finally, we found that these work may be of use to others who perform similar

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Sen Zhou, Jian Xu, Ying Li, and Cong Yue "Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190Q (19 December 2022); https://doi.org/10.1117/12.2645474

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KEYWORDS

Particles

Scanning electron microscopy

Shape analysis

Electron microscopes

3D metrology

Atmospheric particles

Error analysis

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