Single-grating interferometry for at-wavelength wavefront metrology at Shanghai Synchrotron Radiation Facility

Lian Xue; Shangyu Si; Zhongliang Li

doi:10.1117/12.2662704

12 April 2023 Single-grating interferometry for at-wavelength wavefront metrology at Shanghai Synchrotron Radiation Facility

Lian Xue, Shangyu Si, Zhongliang Li

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Proceedings Volume 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022); 125652N (2023) https://doi.org/10.1117/12.2662704
Event: Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 2022, Shanghai, China

Abstract

In order to meet the at-wavelength detection requirements of ultra-high precision optical elements, a metrology device based on single grating interferometry is developed on the test beamline at the Shanghai Synchrotron Radiation Facility (SSRF). First, this device uses a single grating configuration, combined with a high-resolution detection system and spatial harmonic imaging technology to form a wavefront detector. Then, using the single grating Talbot interferogram, the sample spectrum is analyzed by Fourier transform of the interferogram. Finally, the systematic error of the wavefront detector is analyzed, and the surface gradient of the composite refractive lens is measured with this device. The experimental results show that the systematic error of the single grating wavefront detector is less than /50 rms, and the surface shape error of the compound refractive lens is about /33 rms. This device can meet the detection requirements of ultra-high precision optical elements.

Citation Download Citation

Lian Xue, Shangyu Si, and Zhongliang Li "Single-grating interferometry for at-wavelength wavefront metrology at Shanghai Synchrotron Radiation Facility", Proc. SPIE 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 125652N (12 April 2023); https://doi.org/10.1117/12.2662704

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KEYWORDS

Wavefronts

Sensors

Optical components

X-rays

Synchrotron radiation

Interferometry

Wavefront metrology

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